JPS5911100B2 - フオトラツカ−ジヨキヨザイ - Google Patents

フオトラツカ−ジヨキヨザイ

Info

Publication number
JPS5911100B2
JPS5911100B2 JP50137686A JP13768675A JPS5911100B2 JP S5911100 B2 JPS5911100 B2 JP S5911100B2 JP 50137686 A JP50137686 A JP 50137686A JP 13768675 A JP13768675 A JP 13768675A JP S5911100 B2 JPS5911100 B2 JP S5911100B2
Authority
JP
Japan
Prior art keywords
carbon atoms
remover
weight
weight percent
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50137686A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5172503A (en
Inventor
ハインツ ナイジウス カール
ボイマー ヴイルヘルム
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Merck Patent GmbH
Original Assignee
Merck Patent GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Merck Patent GmbH filed Critical Merck Patent GmbH
Publication of JPS5172503A publication Critical patent/JPS5172503A/ja
Publication of JPS5911100B2 publication Critical patent/JPS5911100B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31127—Etching organic layers
    • H01L21/31133—Etching organic layers by chemical means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)
JP50137686A 1974-11-16 1975-11-15 フオトラツカ−ジヨキヨザイ Expired JPS5911100B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2454399A DE2454399C2 (de) 1974-11-16 1974-11-16 Ablösemittel für Fotolacke

Publications (2)

Publication Number Publication Date
JPS5172503A JPS5172503A (en) 1976-06-23
JPS5911100B2 true JPS5911100B2 (ja) 1984-03-13

Family

ID=5931004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50137686A Expired JPS5911100B2 (ja) 1974-11-16 1975-11-15 フオトラツカ−ジヨキヨザイ

Country Status (8)

Country Link
US (1) US4070203A (en])
JP (1) JPS5911100B2 (en])
BE (1) BE835591A (en])
CH (1) CH601916A5 (en])
DE (1) DE2454399C2 (en])
FR (1) FR2291607A1 (en])
GB (1) GB1491577A (en])
IT (1) IT1052264B (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164498U (ja) * 1984-04-11 1985-10-31 川崎　敏明 船舶における昇降巻取り式帆走装置

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4169068A (en) * 1976-08-20 1979-09-25 Japan Synthetic Rubber Company Limited Stripping liquor composition for removing photoresists comprising hydrogen peroxide
US4165295A (en) * 1976-10-04 1979-08-21 Allied Chemical Corporation Organic stripping compositions and method for using same
US4242218A (en) * 1976-11-08 1980-12-30 Allied Chemical Corporation Phenol-free photoresist stripper
US4165294A (en) * 1976-11-08 1979-08-21 Allied Chemical Corporation Phenol-free and chlorinated hydrocarbon-free photoresist stripper comprising surfactant and hydrotropic aromatic sulfonic acids
US4215005A (en) * 1978-01-30 1980-07-29 Allied Chemical Corporation Organic stripping compositions and method for using same
US4190461A (en) * 1978-03-20 1980-02-26 Alpha-Omega Services, Inc. Method for removing metallic seeds from nylon tubing used in interstitial brachytherapy
CA1116059A (en) * 1978-05-22 1982-01-12 Allied Corporation Phenol-free and chlorinated hydrocarbon-free photoresist stripper
US4221674A (en) * 1979-03-09 1980-09-09 Allied Chemical Corporation Organic sulfonic acid stripping composition and method with nitrile and fluoride metal corrosion inhibitor system
US4187191A (en) * 1978-07-26 1980-02-05 General Motors Corporation Photoresist stripper with dodecylsulfonic acid and chlorinated solvents
US4414035A (en) * 1979-05-21 1983-11-08 Petrolite Corporation Method for the removal of asphaltenic deposits
US4664721A (en) * 1981-12-07 1987-05-12 Intercontinental Chemical Corporation Printing screen cleaning and reclaiming compositions
US4491530A (en) * 1983-05-20 1985-01-01 Allied Corporation Brown stain suppressing phenol free and chlorinated hydrocarbons free photoresist stripper
JPS6235357A (ja) * 1985-08-09 1987-02-16 Tokyo Ohka Kogyo Co Ltd ホトレジスト用剥離液
DE3836403A1 (de) * 1988-10-26 1990-05-03 Hoechst Ag Entwicklungsloesemittel fuer durch photopolymerisation vernetzbare schichten sowie verfahren zur herstellung von reliefformen
US5312719A (en) * 1988-10-26 1994-05-17 E. I. Du Pont De Nemours And Company Developing solvent for layers which are crosslinkable by photopolymerization and process for the production of relief forms
US4971715A (en) * 1988-11-18 1990-11-20 International Business Machines Corporation Phenolic-free stripping composition and use thereof
US4992108A (en) * 1990-01-18 1991-02-12 Ward Irl E Photoresist stripping compositions
DE4303923A1 (de) * 1993-02-10 1994-08-11 Microparts Gmbh Verfahren zum Beseitigen von Kunststoffen aus Mikrostrukturen
US5728664A (en) * 1996-04-15 1998-03-17 Ashland, Inc. Photoresist stripping compositions
KR100301680B1 (ko) 1999-06-28 2001-09-22 주식회사 동진쎄미켐 네가티브 화학증폭 레지스트용 스트리퍼 조성물
JP5195362B2 (ja) * 2008-12-03 2013-05-08 三菱電機株式会社 回路基板の製造方法および回路基板
CN105339785B (zh) 2013-03-29 2018-06-05 生命技术公司 用于处理半导体装置的方法
CN107429294B (zh) 2015-03-05 2021-10-26 生命技术公司 生物传感器的表面稳定
KR20170132813A (ko) 2015-03-26 2017-12-04 라이프 테크놀로지스 코포레이션 반도체 장치를 처리하는 방법
TWI824164B (zh) * 2019-07-11 2023-12-01 德商馬克專利公司 光阻移除劑組合物及自基板移除光阻膜之方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2607741A (en) * 1952-08-19 Offiol
US985405A (en) * 1907-03-30 1911-02-28 Chadeloid Chemical Co Paint or varnish remover.
US1185641A (en) * 1911-10-10 1916-06-06 Chadeloid Chemical Co Finish-removing process.
US2750343A (en) * 1952-04-12 1956-06-12 Adolph J Beber Paint brush cleaner
US3179609A (en) * 1958-09-25 1965-04-20 Union Carbide Corp Finish removal formulation
US3582401A (en) * 1967-11-15 1971-06-01 Mallinckrodt Chemical Works Photosensitive resist remover compositions and methods
US3574123A (en) * 1968-04-23 1971-04-06 Grace W R & Co Paint stripping composition and process
US3592691A (en) * 1968-07-11 1971-07-13 Westinghouse Electric Corp Photoresist removal method
US3625763A (en) * 1968-12-04 1971-12-07 Bunker Ramo Conformal coating stripping method and composition
US3629004A (en) * 1969-04-17 1971-12-21 Grace W R & Co Paint-removing method
US3813309A (en) * 1969-12-23 1974-05-28 Ibm Method for stripping resists from substrates
DE2007693B2 (de) * 1970-02-19 1976-12-16 Siemens AG, 1000 Berlin und 8000 München Verfahren zum lokalen abaetzen einer auf einem halbleiterkoerper aufgebrachten siliciumnitridschicht

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164498U (ja) * 1984-04-11 1985-10-31 川崎　敏明 船舶における昇降巻取り式帆走装置

Also Published As

Publication number Publication date
IT1052264B (it) 1981-06-20
BE835591A (fr) 1976-05-14
DE2454399C2 (de) 1981-09-24
FR2291607B3 (en]) 1977-12-16
GB1491577A (en) 1977-11-09
CH601916A5 (en]) 1978-07-14
DE2454399A1 (de) 1976-05-26
US4070203A (en) 1978-01-24
FR2291607A1 (fr) 1976-06-11
JPS5172503A (en) 1976-06-23

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